Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 5 of 5 for “"Mask fabrication"”.
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Gold-electroplating technology for X-ray-mask fabrication
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
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Double-Exposure Gray-Scale Photolithography
… through sub-resolution pixels on a photomask. The number of photoresist levels is determined by the number of different pixel sizes on the mask, which is restricted by mask fabrication. This drawback prevents the use of gray-scale photolithography for applications that need a high …
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Development of soft lithography based non-planar and 3-D photo-patterning techniques
The fusion of soft lithography fabrication processes and optical lithography has been demonstrated in the literature. The focus of this thesis is on the adaptation of soft lithography protocols and further understanding of the materials chemistry of PDMS that allows for fabrication of soft optical …
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Design, fabrication and testing of a lateral self-cleaning MEMS switch
… the required displacement of the actuator.The 5-mask fabrication process for the device consists of several steps including bottom electrode lift-off, plating mold formation, electroplating, mold removal, switch structure formation and device release. The major issue is the fabrication of the …
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FABRICATION AND THERMAL ANALYSIS OF POLYIMIDE-BASED X-RAY MASKS AT THE SYNCHROTRON LABORATORY FOR MICRO AND NANO DEVICES, CANADIAN LIGHT SOURCE
… to transfer absorber patterns on an X-ray mask into the photoresist to fabricate high-aspect-ratio micro and nano scale structures (HARMNST). The Synchrotron Laboratory for Micro and Nano Devices (SyLMAND) at the Canadian Light Source (CLS) is a DXRL laboratory with continuous tuning …