Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 1 of 1 for “"Mask Cleaning"”.
-
Removal of organic contaminants from lithographic materials
… in the form of organic contamination on the mask. Traditional cleaning methods employ the use of wet chemicals to etch contamination off of a surface, however this is limited in the sub-micron range of contaminant particles due to lack of transport of sufficient liquid chemical to the surface …