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Showing 1 to 10 of 10 for “"Magnetronsputtern"”.
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Atomistic effects in reactive direct current sputter deposition
The aim of this work is to gain a better understanding of the reactive sputtering process, with special emphasis on explanations from a microscopic point of view. Several steps were undertaken towards this end: An already existing deposition system was upgraded with new pressure gauges and a …
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Fundamental processes in growth of reactive DC magnetron sputtered thin films
This work seeks an atomistic understanding of fundamental processes in DC reactive magnetron sputtering of optical functional coatings. From a comparative study for different metal-oxygen combinations, which is illustrated by two oxide deposition reports on neighbouring elements - hafnium and …
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Phase change optical recording - preparation and X-ray characterization of GeSbTe and AgInSbTe films
The rapidly increasing net amount of digital information requires higher data- storage capacities and transfer rates. As a consequence, there is a need for a continuous improvement of the media concept and design. Phase change recording technology offers attractive features for erasable data …
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Untersuchungen zu Schichtwachstum und Grenzflächen an Ta-basierten Dünnschichten mittels XPS
In der vorliegenden Arbeit wird das Wachstum von Ta- und TaN-Schichten auf Si- und SiO_2-Substraten untersucht Die Schichten werden dabei unter technologienahen Bedingungen mittels Magnetron-Sputtern abgeschieden. Die Untersuchungen erfolgen hauptsächlich mit winkelaufgelöster …
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Ion-induced stress relaxation during the growth of cubic boron nitride thin films
The aim of the presented work was to deposit cubic boron nitride thin films by magnetron sputtering under simultaneous stress relaxation by ion implantation. An in situ instrument based on laser deflectometry on cantilever structures and in situ ellipsometry, was used for in situ stress …
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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
In the thesis, the relationship between the plasma chemistry and energetics, and the thin film composition and structure evolution of transition metal oxide thin films deposited by magnetron sputtering in an Ar/O2 atmosphere is investigated as a function of the O2 partial pressure (p(O2)). The …
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Kombinatorische PVD-Synthese und Strukturuntersuchungen der Ge-Sb-Te-Schichten
In this work a mapping of the structure and structural change of metastable and stable phases of the ternary Ge-Sb-Te system was realized in a wide composition range including the quasi binary line GeTe-Sb2Te3. Therefore homogeneous films and films with a compositional gradient were deposited using …
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Lichtstreuende Oberflächen, Schichten und Schichtsysteme zur Verbesserung der Lichteinkopplung in Silizium-Dünnschichtsolarzellen
This doctoral thesis addresses the light yield and the optical loss mechanisms in thin-film solar cells based on amorphous (a-Si:H) and microcrystalline (µc-Si:H) silicon. The study focuses on the optimization of the aluminum-doped zinc oxide (ZnO:Al) front contact, which has to combine low series …
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Untersuchung gasochrom schaltender Wolframoxide
Analysis of gasochromic switching tungsten oxide layers This thesis describes the properties of reactively dc-magnetron sputtered tungsten oxide (WOx) films. The films are gasochromically switched with diluted hydrogen (H2) in argon or nitrogen, with a very thin surface film of palladium (Pd) as …