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Showing 1 to 11 of 11 for “"Magnetrons."”.
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Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system
… the ITO film growth. The closed-field unbalanced magnetrons create a plasma in the intervening region rather than confine it near the target, thus achieving a large-area processing capability. An RF-compensated Langmuir probe was used to characterize and compare the plasmas in mirrored balanced …
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Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering
… return effect. In industrial settings, linear magnetrons are more often used than 4 inch or smaller magnetrons. Because HiPIMS is currently not competitive on large scales, there is a demand for a similar magnet pack, but for a linear geometry, scalable to any desired length. Circular magnet …
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A study of the structure of codeposited PVD coatings
… multilayerdeposition from vertically opposed magnetrons and codeposition from coplanarmagnetrons, both using closed field magnetic arrays. Both methods arefundamentally the same. It is the orientation and manipulation of the substratesduring the deposition process which leads to either a …
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HIGH EFFICIENCY AXIAL DIFFRACTION OUTPUT SCHEMES FOR THE A6 RELATIVISTIC MAGNETRON
… that showed improved power in other relativistic magnetrons was also considered by simulation in an A6 magnetron with radial extraction.'
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Fast start of oscillations in a short-pulse relativistic magnetron driven by a transparent cathode.
… of oscillations in short-pulse relativistic magnetrons. The construction of the transparent cathode involves the removal of longitudinal strips of material from a hollow cathode. The resultant geometry has manifold advantages the first and the foremost of which is that it makes the cathode …
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Novel components by magnetron sputtering
… foils were deposited using vertically opposed magnetrons,with the A^Os and TiN layers produced by reactive sputtering. The Al-Mg/Mgfoils were deposited from commercial purity Al and Mg targets in a co-planarconfiguration; conditions having been initially found that produced high hardness/high …
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Influence of implementing straps on pulsed relativistic magnetron operation
A simulation study on the effect of applying straps to an A6 relativistic magnetron was conducted to determine potential use in reducing mode competition. Several strap configurations were evaluated against the basic anode-endcap geometry of the A6 magnetron as well as the open anode geometry. The …
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Investigation into the effects of chromium cross-contamination in niobium sputter deposited coatings using a multi-target PVD system.
… HTC 1000-4 ABS which utilises four unbalanced magnetrons in closed-field geometry.A typical coating process uses Arc evaporation to clean the substrates prior to deposition and can involve the use of a target for this stage that is not required during the coating process. During deposition to …
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3D ICEPIC simulations of pulsed relativistic magnetron with transparent cathode : a comparative study with 3D MAGIC simulations
Ongoing research at the University of New Mexico (UNM) shows significant improvement in the start time and rate of build-up of microwave oscillations in a relativistic magnetron that uses a transparent cathode. In recent studies conducted at UNM the experimental results and the results of numerical …