Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 1 of 1 for “"Magnetic Mitigation"”.
-
Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources
… degrade the quality of collector optics. The mitigation of this debris is one of the main problems facing potential manufacturers of EUV sources. The use of magnetic fields to deflect ionic debris has been proposed and is investigated here. In this thesis, a detailed computational model of …