Global ETD Search

Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.

Results

Showing 1 to 2 of 2 for “"Magnetic Field Design"”.

  1. Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering

    … main issue that is addressed by the author. The magnetic field strength, shape, and inclination on the target surface all effect the sputtering yield of the magnetron [6]. Previous studies by Raman et. al [7,8] have shown that a complex magnetic field topology allows for an increased deposition …

    uiuc Repository record for Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering (opens in a new tab)