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Showing 1 to 2 of 2 for “"Magnet Pack"”.

  1. Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering

    McLain, Jake ThomasUniversity of Illinois at Urbana-Champaign2017

    High Power Impulse Magnetron Sputtering (HiPIMS) or High Power Pulsed Magnetron Sputtering (HPPMS) is a magnetron sputtering method that has proven to be a promising ionized physical vapor deposition (PVD) technique, with industrial implementation hindered by low deposition rates. HiPIMS applies …

    uiuc Repository record

  2. Magnetic field optimization for high power impulse magnetron sputtering

    Raman, PriyaUniversity of Illinois at Urbana-Champaign2016

    "High Power Pulsed Magnetron Sputtering (HPPMS) or High Power Impulse Magnetron Sputtering (HiPIMS) is a promising Physical Vapor Deposition technique with several advantages over DC Magnetron Sputtering (dcMS). HiPIMS has gained a lot of interest in the recent years from the coating industries. …

    uiuc Repository record