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Showing 1 to 1 of 1 for “"Magentron sputtering"”.
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Process property relations in reactively sputtered transition metal compounds
… compound thin films grown by reactive magnetron sputtering techniques are investigated. In the first part, the effect of energetic species, which are generated by backscattering of plasma ions at the target, on the growth and the properties of transition metal nitride films deposition by direct …