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Showing 1 to 1 of 1 for “"MEMS stage, Comb drive"”.
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Development of a single-stage nano indenter
… the functionality of a single degree-of-freedom stage in a MEMS (Micro-Electromechanical system) platform that enables very precise displacement as well as force control. This type of stage finds use in determining fluid properties such as viscosity; to determine the strength and rigidity of …