Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 12 of 12 for “"MEMS resonator"”.
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Piezoelectric MEMS resonator characterization and filter design
… and first measurements of a new piezoelectric MEMS resonator developed at Draper Laboratory. In addition, some simple filter designs incorporating the resonator with predicted performance parameters were analyzed, with a special focus on the suitability of using the Draper resonator to …
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Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
A microscale beam resonator has been designed and fabricated for use as a modular pressure sensor for vacuum applications. The device dimensions have been optimized to provide measurable signals with low noise. Electrostatic actuation and sensing are both performed using only one pair of …
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Fabrication process changes for performance improvement of an RF MEMS resonator : conformable contact lithography, Moiré alignment, and chlorine dry etching
… fabrication process improvements for a RF MEMS resonator for the purpose of improving the quality factor (Q) and extending the frequency range. The process changes include the use of conformable contact lithography (CCL) and chlorine-based dry etching for improved fine-feature patterning …
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Thermally-actuated piezoresistively-sensed mechanical silicon oscillator
In the past two decades, Microelectromechanical (MEMS) resonators have emerged as front runners for RF front-ends, high frequency filters, and frequency sources in various applications. The prospect of seamless integration with CMOS has provided a significant boost to displace Quartz, which for …
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Design and analysis of MEMS-based metamaterials
… The use of Micro-Electro-Mechanical Systems (MEMS) to create a new metamaterial could improve upon some of these shortcomings due to their small size, high Q. and ease of integration into standard applications and circuit fabrication techniques. In this thesis. I analyze the prospects of a …
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Photonic crystal enhancement and tuning of quantum dot emission
… a high-index dielectric film, using a PC slab resonator to demonstrate enhanced emission from the QDs when they are located at a specific depth within the film. The depth of the QDs within the PC is found to modulate the resonant wavelength of the PC as well as the emission enhancement …
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Development of ultra-stable MEMS oscillators with 10⁻¹¹-level frequency stability via dual-mode temperature compensation
… stability limits of encapsulated silicon MEMS resonators and develops two clock architectures to achieve high-precision, low-drift operation suitable for timing applications. The study is based on an encapsulated, heavily boron-doped Lamé-mode resonator, which provides a stable, aging-free …
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Feedthrough-immune frequency tracking of electrostatic MEMS resonators
Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01
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Lithium niobate RF-MEMS oscillators for IoT, 5G and beyond
… radiofrequency microelectromechanical (RF-MEMS) oscillators for internet-of-things (IoT), 5G and beyond. The dissertation focuses on solving two main problems found nowadays in most of the published works: the narrow tuning range and the low operating frequency (sub 3 GHz) acoustic …
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Performance optimization of lateral-mode thin-film piezoelectric-on-substrate resonant systems
… piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior acoustic properties of a substrate. The use of …
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Development and implementation of a microresonator impactor for atmospheric particulate sensing
… growing field of microelectromechanical systems (MEMS) offers a potential alternative by implementing microresonators as mass sensors. MEMS resonators have high mass sensitivities and have recently seen implementation as particulate matter (PM) monitors. The field of MEMS PM instruments is still …
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Switched-Tank VCO Designs and Single Crystal Silicon Contour-Mode Disk Resonators for use in Multiband Radio Frequency Sources
… references and surface acoustic wave (SAW) resonators in a PLL can exhibit much improved performance; however, these off-chip components add packaging/assembly cost and higher bill of materials, impedance matching issues, and parasitics that can significantly affect performance for RF …