Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 32 for “"MEMS fabrication"”.
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Solder self-assembly for MEMS fabrication
… examines and demonstrates self-assembly of MEMS components on the 25 micron scale onto substrates using the capillary force of solder. This is an order of magnitude smaller than current solder self-assembly in the literature. This thesis also examines self-assembly of high aspect ratio (2:1) …
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Silicon microcavity and microchannel plasma devices: spectroscopy and time-resolved optical experiments
… for devices is implemented through VLSI and MEMS fabrication techniques. In this thesis, the basic physics of plasma discharges is presented, and the performance of Si microplasma devices with inverted pyramidal cavity and V-grooved channel configurations is described in some detail.
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Laser direct-write fabrication of MEMS
Micro-electromechanical systems (MEMS) have many applications in healthcare, consumer electronics, and automobile industry. Unfortunately, the development of novel MEMS is significantly hindered by the limitations of the state-of-the-art MEMS microfabrication processes such as high cost of …
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MEMS spatial light modulator for holographic displays
… (SLM) built using microelectromechanical system (MEMS) technology. Several related MEMS SLMs are reviewed. In particular, the capabilities of Silicon Light Machines' Grating Light Valve (GLV T) and the Polychromator by Honeywell, Sandia, and MIT are examined because they are both diffractive SLMs. …
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Contact-printed microelectromechanical systems
Microelectromechanical systems (MEMS) are ubiquitous. Scalable large-area arrays of MEMS on a variety of substrates, including flexible substrates, have many potential applications. Novel methods for additive fabrication of thin (125±15 nm thick) suspended gold membranes on a variety of rigid and …
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Development of a MEMS Sensor for sub-kPa Shear Stress Measurements
This dissertation discusses the development of MEMS sensors for measuring sub-kPa (<1000Pa) wall shear stresses in high-speed turbulent flows. Wall shear stress is an important flow quantity that is used to characterize flows that can be found in aerospace, automotive, and biomedical applications. …
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Fully Compliant Tensural Bistable Mechanisms (FTBM) with On-Chip Thermal Actuation
… in the MUMPs and SUMMiT V surface micromachining MEMS fabrication technologies. The Stacked Amplified Thermomechanical In-plane Microactuator (StATIM) is also introduced. The StATIM is a compact linear output actuator based on the ATIM that is capable of large displacements relative to the size of …
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Cross-Linked PDMS Expansion Due to Submersion in Liquid and Supercritical CO2
… to Micro-electro-mechanical Systems (MEMS) fabrication, CO2 is often used in the release of stiction for sensitive microstructures. The experimental method was classified as low temperature techniques (less than 100 degrees Celsius). Commonly, the composite exhibits expansion ratio …
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Dendritic Materials as a Dry Release Sacrificial Layer
… than a 49% HF wet etching techniques used in MEMS fabrication. A published process with a faster etch rate could not be found. In order to demonstrate the large sacrificial etching capabilities of HB560 as well as its unique material characteristics, a microblister pack chamber, 5000 mum in …
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A MEMS thermoelectric generator
… fuel processing and miniaturization remain. Microfabrication has the potential to address this miniaturization. Here I present work towards a thermoelectric generator based on micro-electro-mechanical system (MEMS) fabrication technologies. This thesis includes an examination of the current state …
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Optimization of PZT processing using thermal ink-jet printing
… for micro-sensors and actuators. Yet, its use in MEMS has been constrained by limitations in processing PZT with current MEMS fabrication technology. The direct printing of PZT, in place of traditional manufacturing process such as spin-coating, enables on-demand deposition, allowing flexibility …
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Material and fabrication developments in the ion-electrospray propulsion system
… new materials, microfluidic control devices, and fabrication techniques were developed in support of the ion electrospray propulsion system (iEPS) developed by MIT's Space Propulsion Lab. MEMS fabrication techniques are reworked to increase yield reliability of the thruster frames. The focus of …
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Design of surface micro-machined inertial MEMS sensor with meta-heuristic topology optimization
Micro-Electro-Mechanical Systems (MEMS) are getting popular for a variety of applications due to their small size, low cost, and good performance. MEMS devices are designed by combining simple shapes based on the experience of previous cases. Using mathematical design methods such as Topology …
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Design, Fabrication, Testing of CNT Based ISFET and Characterization of Nano/Bio Materials Using AFM
… sensing system. Micro Electro-Mechanical System (MEMS) fabrication techniques, such as photolithography, diffusion, evaporation, lift-off, packaging, etc., are required in the fabrication of the CNT-ISFET structure on p-type silicon wafers. In addition, Atomic Force Microscopy (AFM) based surface …
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MEMS micropump for a Micro Gas Analyzer
This thesis presents a MEMS micro-vacuum pump designed for use in a portable gas analysis system. It is designed to be pneumatically-driven and as such does not have self-contained actuation (the focus of future work). This research was carried out through a series of modeling, design, fabrication, …
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Monolithic Integration of Fluidics, Electronics, and Photonics using CMOS Foundry Processes
In the past decade, the fabrication capabilities of CMOS (complementary metal-oxide-semiconductor) foundries have been successfully applied to next-generation sequencing systems to simultaneously lower the cost, miniaturize the footprint, and improve the throughput of the instrument. By utilizing …
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Rapid Prototyping Of Microfluidic Packages
In the area of MEMS there exists a tremendous need for communication between the micro-device and the macro world. A standard protocol or at least multiple standards would be of great use. Electrical connections have been standardized for many uses and configurations by the integrated circuit …
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Fabrication and material characterization of silver cantilevers via direct surface micromachining
Microelectromechanical Systems (MEMS) rely heavily on the semiconductor industry's manufacturing paradigm. While the standardized process model allows semiconductor chips to benefit from economy of scale and be sold at low prices, MEMS devices use specialized processes and subsequently have to be …
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Active Thermal Augmentation and Ultra Dense MEMS-Based Electrospray Thrusters
… Advances in microelectromechanical systems (MEMS) fabrication techniques have enabled the former, and an ultra-dense silicon-based ionic liquid electrospray thruster with record-breaking emitter density is tested. The densified electrospray thruster is successfully fired, exhibiting emission …
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Fabrication of Hybrid Atomic Force Microscopy Probe for Enhancing Sensitivity of AFM-Infrared Nanoscale Spectroscopy
… To address this issue, I am developing a MEMS fabrication method enabling us to make a hybrid AFM probe (silicon cantilever with photopolymeric tip). Fabrication process starts with fixating a conventional AFM probe over a Petri dish with some photopolymeric resin which covers underneath …
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