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Showing 1 to 1 of 1 for “"MEMS clock"”.
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Development of ultra-stable MEMS oscillators with 10⁻¹¹-level frequency stability via dual-mode temperature compensation
… stability limits of encapsulated silicon MEMS resonators and develops two clock architectures to achieve high-precision, low-drift operation suitable for timing applications. The study is based on an encapsulated, heavily boron-doped Lamé-mode resonator, which provides a stable, aging-free …