Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 6 of 6 for “"MEMS and NEMS"”.
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First Principles Study Of Tribopolymerization On Conductive Material Surfaces
… contact surfaces frictions, is used to lubricate and to protect the surfaces of mechanical gears, it is considered as a major source of contamination to Micro-electro-mechanical system and Nano-electro-mechanical system (MEMS and NEMS) transistors. MEMS and NEMS, analogous to atomic force …
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Design of an STM and EPL control system and linear actuator preload diaphragm
Increasing demand for nano-scale machining processes in the semiconductor industry necessitates new mechanisms for nano-machining. A system capable of nano-scale machining of conductive material via Electronic Pen Lithography (EPL) may fit this niche. The purpose of this research is to develop a …
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Computational studies of stress and structure development resulting from the coalescence of metallic islands
… important in the performance of micro- and nano-electromechanical systems (MEMS and NEMS). Residual stress in thin film components is often treated as an unavoidable side effect of processing steps and the degree of residual stress can drastically affect the performance and properties of …
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Novel Sensing Approaches towards Ultimate MEMS Sensors
Within the past few decades, several micro and nano-electromechanical (MEMS and NEMS) accelerometers, magnetometers and vibration sensors utilizing various actuation and sensing mechanisms have been developed and demonstrated. These sensors are integral to various geographical, industrial, …
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Mechanical Stiffness and Dissipation in Ultrananocrystalline Diamond Films
… known atomic density. The nature of the bond and its high density enable diamond to have superior physical properties such as the highest Young’s modulus and acoustic velocity of all materials, and excellent tribological properties. Recently, conformal thin diamond films have been grown at …
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Steady and Unsteady Thermo-Strucural Simulation of Thermally Actuated Micro- and Nano-Structures
… a thermo-structural simulation for nano-scale and micro-scale structures with pinned and fixed boundary conditions which are either thermally positioned, buckled, or actuated. The study begins with simulating a pinned-pinned beam in micro-scale and nano-scale. The steady state thermo-structural …