Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 7 of 7 for “"MEMS Pressure Sensor"”.
-
Silicon piezoresistors for MEMS pressure sensor applications
… high perfonnance microelectromechanical systems (MEMS) including a range of physical and environmental sensors. Pressure sensors are used for a wide range of monitoring and control applications, e.g. environmental, industrial, aircraft, automotive. Monitoring of vehicle tyre pressures offers …
-
Modeling the Thermal Performance of an Intelligent MEMS Pressure Sensor with Self-Calibration Capabilities
… have increased the demand for more reliable pressure sensors. One of the best methods to ensure reliability is by regularly calibrating the sensor, checking its functionality and accuracy. By integrating a micro-actuator with a pressure sensor, the sensor can self-calibrate, eliminating the …
-
Development of a Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change
A growing industry demand for smart pressure sensors that can be quickly calibrated to compensate for sensor drift, nonlinearity effects, and hysteresis without the need for expensive equipment has led to the development of a self-calibrating pressure sensor. Pressure sensor inaccuracies are often …
-
Characterisation of micromechanical materials and MEMS structures using optically generated ultrasound
… increased commercial demand for miniaturisation, MEMS manufacturers have to characterise their components to improve quality control with ever-higher accuracy and resolution. One method of characterisation, using laser-generated and detected ultrasonic Lamb waves, is described in this thesis. …
-
Development of a porous piezoresistive material and its applications to underwater pressure sensors and tactile sensors
MEMS (Microelectromechanical System) pressure sensor arrays are gaining attention in the field of underwater navigation because they are seen as alternatives to current sonar and vision-based systems that fail to navigate unmanned undersea vehicles (UUVs) in dark, unsteady and cluttered …
-
The Testing and Verification of a Nanomembrane Based Pressure Sensor for Small-Scale Underwater Pressure Measurements
A MEMS piezoresistive pressure sensor provides a low-cost and accurate means of detecting and quantifying small-scale disturbances in underwater environments. A highly sensitive MEMS pressure sensor has been developed that can be packaged in two different ways – one in a cylindrical housing, and …
-
Stretchable, multimodal, large-area sensor arrays fabricated using excimer laser photoablation technologies
Stretchable, multimodal, large-area sensor arrays can be utilized for many applications such as structural health monitoring of vehicles and infrastructure, tactile feedback for robotics, aerospace research and design, electronic textiles, tactile sensors for flexible displays, and low-cost sensors …