Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 2 of 2 for “"MEMS CAD"”.
-
Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting
In this research, a novel MEMS variable capacitor with two capacitive cavities for energy harvesting was developed that use the wasted energy associated with undesirable mechanical vibrations to power microelectronic sensors and actuators widely found in structures and systems surrounding us. The …
-
Accurate FE-simulation of three-dimensional microstructures
… simulating micro-electro-mechanical systems (MEMS). The software tool aims to improve the solution accuracy of the computed fields from the coupled electrical, thermal and mechanical domains. <br>The fields obey (non-linear) partial differential equations and are derived by a thermodynamic …