Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 5 of 5 for “"MEMS Actuator"”.
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Structural health monitoring in commercial aviation
… ultrasonic, Lamb waves, piezoelectric and MEMS actuator/sensors. The limitations and challenges inhibiting introduction of SHM to industry and recommendations for the future are also discussed.
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Design fabrication and calibration of MEMS actuators for in-situ materials testing
Many MEMS devices utilize thin metallic films as mechanical structures. The elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the bulk material. At these scales the volume fraction of material defects such as: grain boundaries, …
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Miniature Microscope Design And Construction Based On Tilted Rotationally Asymmetric Printed Lenses
… and a Micro-Electrical-Mechanical-Systems (MEMS) actuator for optical sectioning using structured illumination. The opto-mechanical system is designed using a new concept called "zero alignment assembly" in which the lens elements snap into place and are constrained to a precise position …
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Mode I and Mode II Measurements For Stiction Failed Micro-Electro-Mechanical Systems
Among MicroElectroMechanical Systems (MEMS), the most common type of failure is stiction. Stiction is the unintended adhesion between two surfaces when they are in close proximity to each other. Various studies have been conducted in recent years to study stiction. Our research group has shown the …
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Materials selection for microsystems actuators
… philosophy of Micro-Electro- Mechanical Systems (MEMS) from process centric to performance centric. This presents an opportunity to improve the performance of MEMS devices by materials selection beyond the commonly preferred candidates compatible with the Complimentary-Metal-Oxide-Semiconductor …