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Showing 1 to 1 of 1 for “"MEMS, Positioning stages, Parallel kinematics"”.
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Development of standard components for multi-degrees-of-freedom mems positioning stages with closed-loop feedback
… micro-fluidics, bio-medical applications, and MEMS in micro-electro-mechanical systems. These miniaturized devices have advantages such as higher efficiency, less power consumption, and higher sensitivity than their macro counterparts. Especially, silicon-based multi-degree-of-freedom (DOF) …