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Showing 1 to 1 of 1 for “"Lithogrpahy"”.
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Optical sub-diffraction limited focusing for confined heating and lithography
<p>Electronics and nanotechnology is constantly demanding a decrease in size of fabricated nanoscale features. This decrease in size has become much more difficult recently due to the limited resolution of optical systems that are fundamental to many nanofabrication methods. A lot of effort has …