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Showing 1 to 1 of 1 for “"Lithography--Printing; Nanoscience; Nanoimprint lithography"”.
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Towards a universal ultra-thin fluorinated diamond-like carbon coating for nanoimprint lithography imprinters
<p>Nanoimprint lithography (NIL) has proven to achieve arbitrary, nanoscale features, over large areas, without the use of costly step-and-repeat UV lithography tools. The fidelity of the imprinted pattern depends on the elimination of the adhesion between the imprinted polymer and the imprinter …