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Showing 1 to 1 of 1 for “"Lewis acid-base complex"”.

  1. STUDY OF THE SELECTIVE GROWTH OF THIN FILMS: EFFECTS OF A THIRD SPECIES IN ATOMIC LAYER DEPOSITION

    … nanostructures emerge in forms of 3D and more complex geometries, precise control is highly desirable when constructing integrated circuits in semiconductors. Thus, deposition of thin films on dielectrics without affecting metal regions and vice versa is favorable. Atomic layer deposition (ALD) …

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