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Showing 1 to 2 of 2 for “"Laser lift-off"”.
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Thin film technology for optoelectronics and their thermal management
… the junction temperature effectively. Here, the laser-lift-off (LLO) technique was theoretically and experimentally studied. The temperature distribution at the III-nitride/sapphire interface induced by absorption of 248-nm KrF excimer energetic laser pulses was simulated to verify the …
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MOCVD nitridinių p-i-n struktūrų formavimas spinduliuotės jutikliams /
… out to achieve desired shapes and geometries. Laser lift-off was used to separate GaN from the substrate. Different transfer techniques were tested. Dry etching was employed to fabricate mesa structures. E-beam deposition and wet etching were performed for fabrication of metal contact layers. …