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Showing 1 to 1 of 1 for “"Lambwave resonator."”.
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ALN/ALSCN Acoustic Resonant Systems Based on Ultra-Thin Piezoelectric Films
… microelectromechanical system (MEMS) acoustic resonators — surface acoustic wave (SAW), thin-film bulk acoustic resonator (FBAR), and Lamb wave resonators— were investigated by employing the ultra-thin piezoelectric films targeted for mobile filtering application toward the 5th generation (5G) …