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Showing 1 to 1 of 1 for “"LIGA-like"”.
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Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications
… of LMGFET. In this dissertation, a post-IC LIGA-like process for LMGFET microstructure fabrication has been developed that is compatible with monolithic integration with CMOS circuitry. A two-mask post-IC process has been developed in this research for LMGFET fabrication. This novel process …