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Showing 1 to 1 of 1 for “"Kubisches Bornitrid"”.
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Ion-induced stress relaxation during the growth of cubic boron nitride thin films
The aim of the presented work was to deposit cubic boron nitride thin films by magnetron sputtering under simultaneous stress relaxation by ion implantation. An in situ instrument based on laser deflectometry on cantilever structures and in situ ellipsometry, was used for in situ stress …