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Showing 1 to 1 of 1 for “"Kombinatorische Schichtsynthese"”.
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Kombinatorische PVD-Synthese und Strukturuntersuchungen der Ge-Sb-Te-Schichten
In this work a mapping of the structure and structural change of metastable and stable phases of the ternary Ge-Sb-Te system was realized in a wide composition range including the quasi binary line GeTe-Sb2Te3. Therefore homogeneous films and films with a compositional gradient were deposited using …