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Showing 1 to 9 of 9 for “"KOH etching"”.
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Koh etching of silicon
In this research, a series of comparative etching experiments on silicon wafers have been carried out using potassium hydroxide (KOH) for different experimental etching conditions for concentration, temperature and time on (100) orientation p-type silicon wafers. Besides the basic etching …
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Enhanced Fabrication of Microdroplet Generator Nozzle Arrays: Optimizing KOH Etching for Microfluidic Applications
… a critical fabrication step, anisotropic wet etching of pyramidal nozzles using a basic potassium hydroxide (KOH) solution. Given the integral role of nozzle geometry in device operation, high-precision techniques including Reactive Ion Etching (RIE), Deep Reactive Ion Etching (DRIE), and KOH …
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A Study on the Nature of Anomalous Current Conduction in Gallium Nitride
… characteristics is presented in molten KOH etching, as evidenced by CAFM measurements, Schottky diodes, and MODFET's. The aim of this study is to identify anomalous conduction mechanisms, the likely cause of anomalous conduction, and a method for improving the conduction characteristics. …
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Soft Lithographic Patterning on Silicon
… annealed in air, these films were placed into KOH etching solutions and the resulting grain structures were examined via AFM. The data showed that different mole fractions created different grain structures after exposure to the etching solution. Additionally, the resulting etch structures were …
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Microfabricated Shear -Sensitive Tactile Sensor: Development and Application
… integrated circuit (IC) and MEMS technologies. KOH etching is used to make the diaphragm. Low-temperature wafer bonding is used to seal the cavities. EPON su-8 is used to construct the mesa. Silicon isotropic etching is used to release PI/Al/PI leads to realize flexible package. An analytical …
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Design, fabrication, and characterization of a micro fuel processor
… also replaces traditional deep reactive ion etching (DRIE) with wet potassium hydroxide (KOH) etching, an economical and time-saving alternative. A glass brazing method that effectively accommodates the difference in thermal expansion between the silicon reactor and the glass tubes has been …
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Fabrication of critical-angle transmission gratings for high efficiency x-ray spectroscopy
… fine pitch gratings and wet anisotropic etching on thin silicon membranes for straight and ultrahigh aspectratio (~ 150) freestanding structures. Potassium hydroxide (KOH) etching of the nanostructure is extensively investigated to improve etch anisotropy, uniformity, and process …
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MEMS relays for make-break power switching applications : {111} silicon etched planar electrical contacts
… are etched in (100) Si through a combination of KOH etching, and DRIE, bonded to a glass substrate, and plated with a 10 /pm thick buffer film of either copper or nickel-cobalt, and a 1-2 [mu]m thick film of a platinum-family metal such as palladium, rhodium, and alloyed palladium …
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Fabrication of high-throughput critical-angle X-ray transmission gratings for wavelength-dispersive spectroscopy
… grating were done with wet potassium hydroxide (KOH) etching of silicon. This process successfully fabricated small areas of grating and enabled a successful demonstration of the soft x-ray diffraction efficiency. However, the open-area fraction was limited to below 20 percent for four …