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Showing 1 to 1 of 1 for “"Jet-and-flash imprint lithography"”.
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Methods for nano-precise overlay in advanced in pick-and-place assembly
… two nanofabrication techniques in this thesis – Jet-and-Flash Imprint Lithography (J-FIL), and Nano-precise Modular Assembly of Pre-fabricated blocks (N-MAP), with a focus on nano-precise overlay in these techniques. J-FIL currently uses template shape-and-size control, along with x-y-q substrate …