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Showing 1 to 4 of 4 for “"Ionenbestrahlung"”.
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Pattern formation and evolution on Pt(111) by grazing incident ion bombardment
By analyzing by scanning tunnelling microscopy (STM) the amount of material which is removed during grazing incidence ion bombardment from a Pt(111) sample, it was possible to determine the different sputtering yields of ions impinging either on ascending step edges or hitting onto flat terraces. …
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Surface damage through grazing incidence ions investigated by scanning tunneling microscopy
Surface damage, caused by grazing incidence ions, is investigated with variable temperature scanning tunneling microscopy. The experiments are carried out on a Pt(111) crystal. The kinetic energy of noble gas ions is varied between 1-15 keV and the angle of incidence can be adjusted between 78.5° …
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Strukturbildung und Prozessstabilisierung beim reaktiven Sputtern
Reactive sputtering is an important deposition technique for oxides or nitrides employed e.g. in optical coatings. The process is characterized by high deposition rates and compact films as a result of the kinetic energy input from the glow discharge. Nevertheless, this deposition technique suffers …