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Showing 1 to 1 of 1 for “"Interferometric optical microscopy"”.
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Interferometric light microscopy for wafer defect inspection and three-dimensional object reconstruction
… defect inspection system based on laser interferometric microcopy, called epi-illumination diffraction phase microscopy (epi-DPM), to measure both the phase and amplitude of the scattered field from the wafer. To detect deep sub-wavelength defects, we further reduced the noise in the …