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Showing 1 to 5 of 5 for “"Interferometric lithography"”.
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Interferometric lithography and selected applications
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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Submicron patterning using laser interference lithography
… an alternative nanopatterning technique called Interferometric Lithography (IL) are presented. Comprised of the identical process attributes of traditional projection photolithography, IL mirrors the wafer preparation and development procedures of our existing clean room capabilities. The main …
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LARGE AREA 3D PHOTONIC CRYSTALS WITH EMBEDDED WAVEGUIDES
… photonic crystals using a novel interferometric lithography technique. The work also describes the experimental hardware and the appropriate mathematical models for interferometric lithography. vii Additional work concerns the generation of band diagrams for three-dimensional …
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Selective SiGe nanostructures
… on substrates patterned by both conventional and interferometric lithography. We have achieved several important milestones for the fabrication of vertical MOSFETs by selective growth in 100 nm SiO2 features patterned by interferometric lithography. We have observed excellent selectivity to SiO2 …
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Optically Pumped Type-II Mid-Infrared Tunable Distributed Feedback Lasers
… chirped grating was patterned using interferometric lithography (IL) with spherical wavefronts which was then transferred into the top clad of the slab waveguide epi-structure of the laser de- vice. Wavelength tuning is achieved by translationally projecting pump stripe at …