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Showing 1 to 1 of 1 for “"Integrated MEMS sensor"”.
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In situ monitoring of reactive ion etching using a surface micromachined integrated resonant sensor
… process that incorporates a micromachined sensor. The sensor correlates film thickness with changes in resonant frequency that occurs in the micromachined platform during etching. The sensor consists of a platform that is suspended over drive and sense electrodes on the surface of the …