Global ETD Search
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Showing 1 to 4 of 4 for “"In-plane Alignment"”.
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Untersuchungen zum In-plane Alignment der Atlas-Myonkammern
… wird durch verschiedene <br>Alignment-Systeme verbessert. <br>Jede Myonkammer ist mit einem "In-Plane Alignment" ausgestattet. <br>Es besteht aus mehreren Sensorstrecken im Rahmen der Kammer. <br>Die einzelnen Strecken sind mit "Rasnik-Sensoren", <br>einem optischen System zur …
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biaxial alignment in sputter deposited thin films
Thin films which exhibit a preferential out-of-plane orientation as well as a preferential in-plane orientation are called biaxially aligned. In this work, a magnetron is used to deposit such biaxially aligned and to investigate the underlying mechanism. Understanding the biaxial alignment …
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Texture evolution in metal nitride (aluminum nitride, titanium nitride, hafnium nitride) thin films prepared by off-normal incidence reactive magnetron sputtering
… the development of crystallographic texture in aluminum nitride (AlN), titanium nitride (TiN) and hafnium nitride (HfN) films deposited by off-normal incidence reactive magnetron sputtering at room temperature in N2/Ar mixtures. Texture measurements were performed by x-ray pole figure …
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Structure Evolution of Biaxially Aligned Thin Films Deposited by Sputtering
In this work, biaxially aligned thin films are deposited on an inclined substrate by unbalanced magnetron sputtering. Biaxially aligned thin films are polycrystalline thin films whereby the crystallographic orientation of the grains is aligned along two axes, i.e. perpendicular (out-of-plane) and …