Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 11 of 11 for “"Imprint Lithography"”.
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Hydrogen silsesquioxane (HSQ) for use in nano imprint lithography
… Current methods such as electron beam lithography (EBL), Extreme Ultra-Violet Lithography (EUV), and Nano-imprint lithography (NIL) are currently being studied to deliver a high throughput, low-cost process, and high field size for nano-lithography. EBL is a technique which can generate …
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Sub-micron Patterning of ZnO-PMMA Hybrid Films
… or the necessity of expensive equipment. Imprint lithography is a rapid, inexpensive alternative to making sub-micron features that can be tailored to work with a variety of materials. Imprint lithography, while traditionally used with pure polymers has been tailored to be used with …
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Micro scalar patterning for printing ultra fine solid lines in flexographic printing process
… 2.6 μm width. This study also elaborates the imprint lithography process in achieving micro down to nano fine solid lines structure below 10 μm. In an additional, the lanthanum target has been successful printed on variable substrates with good surface adhesion property. This research …
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Membrane technology for the fabrication of three-dimensional photonic crystals
… membranes and investigate emerging lithography techniques for patterning them: nano-imprint lithography and coherent diffraction lithography. We demonstrate the ability to reliably bond these membranes to a new substrate. Finally, we address the novel problem of releasing the …
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Exploration of disruptive technologies for low cost RFID manufacturing
… in the sub 100 nm regime wherein photolithography faces significant challenges. This research analyzes the value chain in the RFID industry and reviews potential technology strategies using the double-helix model of business dynamics and Porter's five forces framework. It also explores …
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Methods for nano-precise overlay in advanced in pick-and-place assembly
… techniques in this thesis – Jet-and-Flash Imprint Lithography (J-FIL), and Nano-precise Modular Assembly of Pre-fabricated blocks (N-MAP), with a focus on nano-precise overlay in these techniques. J-FIL currently uses template shape-and-size control, along with x-y-q substrate position …
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Design, fabrication and characterization of resonant waveguide grating based optical biosensors
… and fabricated applying both electron beam lithography and low cost nano-imprint lithography techniques. A Chromium hard mask aided nano-fabrication technique is developed for making very high aspect ratio optical nano-structure on glass substrate. An aspect ratio of 10 for very narrow (~60 …
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Evanescent field enhanced fluorescence on a photonic crystal surface
… that include replica molding on plastic and nano-imprint lithography on quartz substrates result in devices that are practical for single-use disposable applications. In this dissertation I will address design, fabrication and characterization of PCs that employ the guided mode resonance effect to …
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Nanoimprint lithography for light trapping applications in solar cells
In this thesis, substrate conformal imprint lithography (SCIL) process is adopted to fabricate efficient light trapping structures for thin-film solar cells. The SCIL process can achieve economical and large area patterns with high fidelity sub-micron resolution over non-planar surfaces without …
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Nanoimprint lithography for light trapping applications in solar cells
In this thesis, substrate conformal imprint lithography (SCIL) process is adopted to fabricate efficient light trapping structures for thin-film solar cells. The SCIL process can achieve economical and large area patterns with high fidelity sub-micron resolution over non-planar surfaces without …
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Fluid dynamics of thin films in semiconductor manufacturing processes
… nanostructures often involves the coating and imprinting of thin films onto a substrate. However, defects produced during the manufacturing process destroy the functionality of nanostructures. Thus, the fluid dynamics of thin fluid films involved in the manufacturing process is an interesting …