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Showing 1 to 1 of 1 for “"Hybrid electrothermomechanical (ETM) actuation"”.
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Analysis of hybrid electrothermomechanical microactuators with integrated electrothermal and electrostatic actuation
… is to integrate electrothermal and electrostatic actuation in microelectromechanical systems (MEMS). We look at cases where these two types of actuation are intimately coupled and argue that such integrated electrothermomechanical microactuators have more advantages than pure electrothermal or …