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Showing 1 to 1 of 1 for “"Hollow cathode sputtering system"”.
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Hollow cathode sputtering system - installation, operation and theoretical background
… this work was to assemble, install and operate a hollow cathode sputtering system (HCSS). Therefore a complex vacuum system was built to create the right sputtering environment. The purpose of the HCSS is to develop advanced thin conducting oxides (TCOs) as well as high resistivity transparent …