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Showing 1 to 8 of 8 for “"High Power Impulse Magnetron Sputtering (HiPIMS)"”.
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High power impulse magnetron sputtering (HIPIMS) : Fundamental plasma studies and material synthesis.
… physical vapour deposition technology entitled high power impulse magnetron sputtering (HIPIMS) was suggested. The principle of HIPIMS is to utilize impulses (short pulses) of high power delivered to the target in order to generate high amount of metal ions with degree of metal ionization up to …
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Development of high temperature/oxidation- resistant PVD coatings for cutting tools using HIPIMS
A series of high temperature and oxidation resistant, nanoscale, multilayer PVD, hard coatings have been developed through combine DC Unbalanced Magnetron (UBM) and High Power Impulse Magnetron Sputtering (HIPIMS) deposition technologies. The properties of the coatings lend themselves to the …
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Magnetic field optimization for high power impulse magnetron sputtering
"High Power Pulsed Magnetron Sputtering (HPPMS) or High Power Impulse Magnetron Sputtering (HiPIMS) is a promising Physical Vapor Deposition technique with several advantages over DC Magnetron Sputtering (dcMS). HiPIMS has gained a lot of interest in the recent years from the coating industries. …
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Growth defects in CrN/NbN coatings deposited by HIPIMS/UBM techniques
In recent years, high power impulse magnetron sputtering (HIPIMS) has caught the attention of users due to its ability to produce dense coatings. However, microscopic studies have shown that HIPIMS deposited coatings can suffer from some surface imperfections even though the overall number of …
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Development of nanostructured PVD coatings for total knee replacement joints using HIPIMS.
… coatings for total knee replacement joints using high power impulse magnetron sputtering (HIPIMS). An industrial size four cathode magnetron sputtering system equipped with direct current (DC) and HIPIMS power supplies was used for this purpose. Initially, Plasma diagnostics were carried out using …
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Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering
High Power Impulse Magnetron Sputtering (HiPIMS) or High Power Pulsed Magnetron Sputtering (HPPMS) is a magnetron sputtering method that has proven to be a promising ionized physical vapor deposition (PVD) technique, with industrial implementation hindered by low deposition rates. HiPIMS applies …
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Ultra-thin boron nitride films by pulsed laser deposition: Plasma diagnostics, synthesis, and device transport
… of boron nitride, in this case, is driven by the high kinetic energies and chemical reactivities of the condensing species formed from physical vapor deposition (PVD) processes, which can facilitate growth over large areas and at reduced substrate temperatures. The use of optical emission …
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Comparison of high power impulse magnetron sputtering and modulated pulsed power sputtering for interconnect metallization
… penetration, and create less overhang due to the high directionality of ion flux. In this work, high power impulse magnetron sputtering (HiPIMS) and its derivative, modulated pulsed power (MPP) magnetron sputtering, with their claimed high ionization capability, are proposed for the application of …