Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 1 of 1 for “"Hi-silicate"”.
-
Reliability Studies of TiN/Hf-Silicate Based Gate Stacks
Hafnium-silicate based oxides are among the leading candidates to be included into the first generation of high-[Kappa] gate stacks in nano-scale CMOS technology because of their distinct advantages as far as thermal stability, leakage characteristics, threshold stability and low mobility …