NDLTD logo NDLTD Union Catalog and Global ETD Search

Global ETD Search

Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.

Results

Showing 1 to 1 of 1 for “"HfSixOy"”.

  1. Materials properties of hafnium and zirconium silicates: Metal interdiffusion and dopant penetration studies.

    Quevedo-Lopez, Manuel AngelUniversity of North Texas2002

    … alternate gate dielectric candidates ZrSixOy and HfSixOy are presented. Dopant penetration studies from doped-polysilicon through HfSixOy and HfSixOyNz are also presented. Rutherford backscattering spectroscopy (RBS), heavy ion RBS (HI-RBS), x-ray photoelectron spectroscopy (XPS), high resolution …

    unt Repository record