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Showing 1 to 1 of 1 for “"HfO2, Er2O3, ALD SiO2, MIM Capacitors, Analog-mixed signal, RF"”.
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High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications
… challenges faced by the metal-insulator-metal (MIM) capacitor technology for the radio frequency (RF) and analog-mixed signal (AMS) applications. The MIM capacitors for the RF and AMS applications have requirements of high capacitance densities and low quadratic voltage coefficients of …