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Showing 1 to 1 of 1 for “"Heliumdichte"”.
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Untersuchung der Relaxation elastischer Spannungen durch Helium-Implantation und thermische Behandlung in Si 1-x Ge x / Si-Heterostrukturen
The present work is investigating the relaxation of elastic stresses in Si1-xGex/Si-heterostructures after helium implantation and thermal annealing. Particular attention is directed onto the interplay of helium diffusion and the nucleation and movement of dislocation loops leading to the …