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Showing 1 to 2 of 2 for “"Helium metastables"”.
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Investigation and characterization of the Direct Analysis in Real Time helium metastable beam open-air ion source: Mechanism of ionization, fluid dynamic visualization, and applications
… technique. The ion source creates excited state helium metastables (2 3 S) with an ionization potential of 19.8 eV are created by a glow discharge at atmospheric pressure. The metastables are sent through an optional heater, to aid in desorption, enter the open-air to directly ionize your sample …
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Removal of organic contaminants from lithographic materials
… manufacturing cleaning in mind. A model of the helium metastable density within the processing chamber has been developed in addition to experimental measurements of the metastable density at the sample surface. Cleaning efficiency has been linked to both metastable density as well as electric …