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Showing 1 to 1 of 1 for “"Heated atomic force microscopic tip"”.

  1. Nano-electro-mechanical systems fabricated by tip-based nanofabrication

    This dissertation explores the use of a heated AFM tip for fabrication of NEMS devices. Two critical challenges hindering TBN from NEMS fabrication are addressed in this thesis. First, we experimentally found out that polystyrene nanopatterns deposited by a heated AFM tip can serve directly as etch …

    uiuc Repository record for Nano-electro-mechanical systems fabricated by tip-based nanofabrication (opens in a new tab)