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Showing 1 to 1 of 1 for “"Halogen etching"”.
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Halogen-induced modification of silicon surfaces: etching roughening, and step transformations
… and Monte Carlo simulations to investigate halogen-induced modifications of Si surfaces, including etching, roughening and step transformations. These investigations have focused on elucidating the atomic-level details associated with the evolution of terrace and step sites on …