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Showing 1 to 1 of 1 for “"HIM (Helium Ion Microscope)"”.
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Low ion dose imaging in the Helium Ion Microscope under Neyman Type A statistics
The Helium Ion Microscope (HIM) is a new tool capable of imaging at resolutions not possible in the ubiquitous Scanning Electron Microscope (SEM). However, along with this improvement in imaging, the helium ions used in HIM cause greater damage to samples. Reducing ion doses decreases the amount of …