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Showing 1 to 5 of 5 for “"Gridded energy analyzer (GEA)"”.
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Determination of the ion distribution function during magnetic reconnection in the versatile toroidal facility with a gridded energy analyzer
A gridded energy analyzer (GEA) diagnostic and associated electronics are designed and built to explore the evolution of the ion distribution function during driven magnetic reconnection in the Versatile Toroidal Facility. The temporal evolution of the ion characteristic is measured at different …
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Diagnostics for ionized physical vapor deposition chambers
… designed and developed. The sensor is a combined gridded energy analyzer (GEA) and a quartz crystal microbalance (QCM), with a high aspect ratio collimator in place of the normal electron repeller grid for angular measurement distribution measurements. The collimator is made of copper elements …
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Formation and extraction of a dense plasma jet from a helicon-plasma-injected inertial electrostatic confinement device
… measured by a combination of a Faraday cup and a gridded energy analyzer (GEA). The Faraday cup also included a temperature sensor for collection of thermal power measurements used to compute the efficiency of the IEC device in coupling power into the jet. The GEA allowed for measurement of the …
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Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system
… with the RF enhancement and utilize the ion energy instead of thermal energy to facilitate the ITO film growth. The closed-field unbalanced magnetrons create a plasma in the intervening region rather than confine it near the target, thus achieving a large-area processing capability. An …
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Comparison of high power impulse magnetron sputtering and modulated pulsed power sputtering for interconnect metallization
… (IF) are measured on the substrate level using a gridded energy analyzer (GEA) combined with a quartz crystal microbalance (QCM). Up to 60% has been achieved using a 200 Gauss magnetic field configuration, much higher than the DC magnetron sputtering. It basically increases with higher charging …