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Showing 1 to 2 of 2 for “"Graphite Sputtering"”.
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Studies of diamond film growth using atom beam sources
… up to 1000°C.<br/><br/>The etching of both graphite and diamond by atomic hydrogen has been investigated as a function of temperature and intensity. A model has been developed which explains both the temperature and intensity variation of the graphite sputtering yield. The etch rate of …
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Material sputtering at low ion energies: From atomistics to engineering models with molecular dynamics, Monte Carlo, and data-driven approaches
Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2025-03-28 without embargo terms