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Showing 1 to 13 of 13 for “"Fluorocarbons"”.
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Atmospheric fate of various fluorocarbons
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1993.
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Evaluation of unsaturated fluorocarbons for dielectric Etch applications
… have been investigated to date, including hydrofluorocarbons (HFCs), iodofluorocarbons (IFCs), and NF3/hydrocarbons. One class of chemistries that have shown considerable promise is the unsaturated fluorocarbons (UFCs). The research documented herein uses the UFCs to assess etch process and …
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Synthesis and characterization of molecules to study the conformational barriers of fluorocarbon chains
Fluorocarbons are known to be stiffer than their hydrocarbon analogues, a property that underlines the extensive industrial application of fluorocarbon materials. Although there has been previous studies on the rotational barrier of molecules having fluorocarbon centers, a detailed systematic study …
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Total electron scattering cross sections of tetrafluoromethane, trifluoromethane, hexafluoroethane, and octafluorocyclobutane in the energy range 0.10 to 4.50 keV.
… to predict the cross sections of linear fluorocarbons as a function of the electron energy and the number of atoms in the target molecule. This empirical formula is used to calculate the total cross sections of linear fluorocarbons in the energy range 0.30 to 3.50 keV. Those empirically …
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Temperature -Programmed Desorption Studies on Methanol, Benzene, and Hexafluoroacetylacetone on (2X1)pt(110)
… carbon dioxide, a carbonaceous deposit, and fluorocarbons are the decomposition products. Hhfac is thus not a suitable etchant for platinum.
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Origin, evolution, and control of sidewall line edge roughness transfer during plasma etching
… the etch through the use of lower-polymerizing fluorocarbons or the addition of oxygen was shown to effectively control excessive roughening on solid films, while porous dielectrics remain challenging. Finally, an inductively-coupled plasma beam source was used to conduct a preliminary …
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Tunable liquid microlenses formed from dynamically re-configurable double emulsions
… formed from immiscible hydrocarbons and fluorocarbons offer a promising platform as reconfigurable micro-optical lenses. These droplet-based lenses can be reconfigured to strongly focusing, nearly transparent, or strongly scattering geometries. The dynamic variation of the lenses' optical …
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Physiological Parameters During Perfusion Fixation of the Rat Central Nervous System for Electron Microscopy
… this effect was diminished when oxygenated fluorocarbons were used in the fixative perfusate.</p> <p>4) The cerebral impedance gradually increased in all animals dying without exsanguination prior to perfusion, and gradually increased in most animals following perfusion. The oxygenated …
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Green chemistry : dense carbon dioxide and water as environmentally benign reaction media
… results observed in fluorocarbon solvents (fluorocarbons and scCO₂ are known to behave similarly as solvents), a solvophobic mechanism was inferred as the cause of the rate acceleration observed for this particular reaction in scCO₂. In order to utilize the complementary solvation powers of …
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Development of novel alternative chemistry processes for dielectric etch applications
… of modified fluorocarbon molecules: hydrofluorocarbons (HFCs), iodofluorocarbons (IFCs), and unsaturated fluorocarbons (UFCs). In addition, other chemistries, namely trifluoroacetic anhydride (TFAA), oxalyl fluoride, and octafluorotetrahydrofuran, were also examined. The focus of much of …
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Comparison of transport effects of perfluorinated and hydrocarbon surfactants on environmental co-contaminants
<bold>ABSTRACT</bold>COMPARISON OF TRANSPORT EFFECTS OF PERFLUORINATED AND HYDROCARBON SURFACTANTS ON ENVIRONMENTAL CO–CONTAMINANTSByRashad Najee Simmons The use of groundwater as drinking water justifies efforts for the prevention and remediation of groundwater contamination by environmental …
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The Measurement of Decomposition Products of Select Gases as an Indicator of a Concealed Mine Fire
Currently, techniques used to determine whether or not there is a concealed fire in an inaccessible area of a coal mine are not definitive. Inaccessible areas of coal mines include: 1. A mined-out area, such as a long-wall gob. 2. A mine area, or entire mine, that has been sealed to extinguish a …
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Study of PECVD Films Containing Flourine and Carbon and Diamond Like Carbon Films for Ultra Low Dielectric Constant Interlayer Dielectric Applications
Lowering the capacitance of Back-end-of-line (BEOL) structures by decreasing the dielectric permittivity of the interlayer dielectric material in integrated circuits (ICs) lowers device delay times, power consumption and parasitic capacitance. a:C-F films that are thermally stable at 400C were …