Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 5 of 5 for “"Fluorocarbon Plasmas"”.
-
Surface kinetics modeling of silicon oxide etching in fluorocarbon plasmas
Fluorocarbon plasma for silicon oxide etching is a complicated system involving many ion and neutral species. Depending on the plasma condition, many difficulties arise such as RIE lag, etch stop, and low selectivity to photoresist. For a better understanding of the process it is necessary to have …
-
Surface Reaction Mechanisms in Plasma Etching Processes
Surface reactions occurring in fluorocarbon plasmas also influence plasma properties by consuming or generating plasma fluxes. Of particular interest is the effect that surfaces have on CF2 densities, as CF2 is a precursor for polymer formation. These processes were investigated with the integrated …
-
An experimental study and modeling of Transformer-Coupled Toroidal Plasma processing of materials
… used to determine the neutral gas temperature of fluorocarbon plasmas. In a C2F6 discharge at a power density of 15 W/cm3, rotational and translational temperatures above 5000K were observed while vibrational temperatures above 8000K were found. The temperature measurements using C2 molecules were …
-
Radiation Transport in Low Pressure Plasmas: Lighting and Semiconductor Etching Plasmas
… molecular and atomic species in technological plasmas. In some products like lamps, the transport of radiation is an important design consideration. In other instances, such as semiconductor materials processing, the role of UV photons in surface processes is a side product and is poorly …
-
Etching of Silicon, Silicon Nitride, and Atomic Layer Etching of Silicon Dioxide using Inductively Coupled Plasma Beams
… be achieved by ion-assisted etching using hydrofluorocarbon gases, such as CH3F, often with addition of O2. Despite the importance of this process, studies of the basic plasma chemistry and plasma-surface interactions when using these gases are largely lacking. Furthermore, fabrication of …