NDLTD logo NDLTD Union Catalog and Global ETD Search

Global ETD Search

Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.

Results

Showing 1 to 1 of 1 for “"Fin Field Effect Transisto (FinFET)"”.

  1. Optimization for advanced lithography

    Du, YuelinUniversity of Illinois at Urbana-Champaign2014

    … been coming up in the recent decade, such as fin based multiple-gate field-effect (FinFET) transistors, electron beam lithography (EBL), self-aligned double patterning (SADP) lithography, directed self-assembly (DSA), extreme ultraviolet lithography (EUVL), etc. Each of the advanced …

    uiuc Repository record