Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 12 of 12 for “"Feature profile"”.
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Feature profile evolution during the high density plasma etching of polysilicon
… transistor gate. The etching of very small features (-0.25 jim) in the -2500 A thick films, performed at low operating pressures (-10 mTorr), must be accompanied with minimal etching artifacts that can degrade device performance. This thesis aims to understand the causes for the etching …
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Modeling Plasma Equipment and Feature Profile in Ionized Metal Physical Vapor Deposition
A three-dimensional HPEM is employed to examine the consequences of asymmetric excitation due to the transmission line effects and irregular sputter tracks on species densities and fluxes. It was found that for typical conditions for Al IMPVD the metal species have improved symmetry due to charge …
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Study of plasma-surface kinetics and simulation of feature profile evolution in chlorine etching of patterened polysilicon
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.
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Study of plasma-surface kinetics and feature profile simulation of poly-silicon etching in Cl²/HBr plasma
… are incorporated into a Monte Carlo based feature profile simulator, and profile evolution has been simulated under various processing conditions. The realistic plasma beam was used to measure the etching yields of poly-silicon with Cl2/HBr chemistry at different ion energies. The etching …
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Polymorphic Adversarial DDoS attack on IDS using GAN
… I used several techniques to update the attack feature profile and generate polymorphic data. This data will change the feature profile in every cycle to test if the IDS can detect the new version attack data. Simulation results from the proposed model show that by continuous changing of attack …
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Using genetic algorithm to "fool" HMAX object recognition model
… tasks [1]. HMAX decomposes an image into features which are passed to a classifier. These features each capture information about a small section of the input image but might not have information about the overall structure of the image if there is not a significant number of overlapping …
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Transport in Low Pressure Plasma Reactors for Materials Processing
… source has been modeled at the reactor and feature scale. The consequences of varying process parameters such as power, pressure and magnetic fields have been investigated for a hollow cathode magnetron source and comparison has been made with experiments. The fluxes incident on the wafer …
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Complementary computational chemistry and surface science experiments of reaction pathways in aluminum chemical vapor deposition
… industry have recognized these challenges and featured atomistic process modeling as one of the "Difficult Challenges" for designs below 100 nm, predicted beyond the year 2006. Among these tasks, obtaining detailed, quantitative understanding of process chemistry and physics has been identified …
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Multiscale modeling of thin film deposition processes
… that affect overall topology of the microscale features. Copper ECD process involves complex surface reactions and transport phenomena that ranges over different length scales. In this work, predictive simulation tools for these two processes have been developed by investigating the surface …
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Discovery of acoustic emission based biomarker for quantitative assessment of knee joint ageing and degeneration
… four movement phases and extended to waveform features extracted from AE signals. While the quantity of AE events was found to follow certain statistical trends related to age and degeneration in each movement phase, detail statistical analysis of AE waveform features yielded the peak amplitude …
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DL-based defense against polymorphic network attacks
Network security is of vital importance in our world dominated by internet systems. These systems are vulnerable to large-scale rapidly evolving attacks by sophisticated cyber attackers who can have an upper edge over the defensive systems. Artificial Intelligence (AI) based intrusion detection …
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Modeling of complex surface interactions in low and high pressure plasmas
… of integrated cir-cuits (IC). Anisotropic features are easily obtained by controlling reactive ion trajectories in plasma. Twisting and bowing are two main issues during high aspect ratio (HAR) fea-ture etching. Twisting is, instead of a feature etching vertically, the feature twists or …